SLVK181 January 2025 DRV8351-SEP
The DRV8351-SEP is fabricated in the TI LBC9 process with 2LM + METDCU back-end-of-line (BEOL) stack. The total stack height from the surface of the passivation to the silicon surface is 8.07μm based on nominal layer thickness as shown in Figure 5-1. Accounting for energy loss through the 1mil thick Aramica beam port window, the 40mm air gap, and the BEOL stack over the DRV8351-SEP, the effective LET (LETEFF) at the surface of the silicon substrate and the depth was determined with the SEUSS 2020 Software (provided by the Texas A&M Cyclotron Institute and based on the latest SRIM-2013 [7] models). The results are shown in Ion LETEFF, Depth, and Range in Silicon.
| Ion Type | Beam Energy (MeV / nucleon) | Angle of Incidence | Degrader Steps (Number) | Degrader Angle | LETEFF (MeV × cm2/ mg) |
|---|---|---|---|---|---|
| 109Ag | 15 | 0 | 0 | 0 | 48 |
| 109Ag | 15 | 0 | 0 | 0 | 43 |
| 84Kr | 15 | 0 | 0 | 0 | 30.6 |
| 63Cu | 15 | 0 | 0 | 0 | 20.2 |